CVD rotary furnace

The ternary positive electrode material CVD rotary furnace is a core equipment for surface coating or doping modification of lithium-ion positive electrode materials through chemical vapor deposition technology. Its core function is to uniformly deposit nano coatings of gas-phase precursors on the surface of materials under high temperature and atmosphere protection environment, improving the material's cycling stability and rate performance.

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Product Highlights

Rotation+baffle synergy

The material flipping frequency is increased by 3 times, the coating thickness deviation is ≤ 50nm, and the electrical performance is improved by 15% compared to static CVD.

Three temperature zone independent temperature control

Preheating zone (400 ℃) → reaction zone (800 ℃) → cooling zone (300 ℃) segmented regulation to reduce premature decomposition of precursors.

Fully enclosed inert environment

Nitrogen protection+real-time monitoring of oxygen content to eliminate the risk of oxygen explosion in high nickel materials.

Anti blocking material design

The inclination angle of the furnace tube can be adjusted from 0 to 35 degrees, and the hydraulic push rod assists in discharging, with a residual rate of less than 0.1%.

30 segment programmed temperature control

PID algorithm accuracy ± 1 ℃, supports heating rate of 30 ℃/min, reduces energy consumption by 40%

Product Parameters

Maximum temperature (℃)	Processing capacity (Kg)	Temperature control accuracy(℃)	Furnace tube speed (r/min)	Tilt angle (°)
1200	25-100	±1	3~13	0~35

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